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Mechancal properties of Si added TiN(TiSiNx) thin films deposited by pipe type cathodic arc deposition process Characterization of CNx thin films by the gas effusion technique by Park, Minseok (author);Kim, Daeyoung (author);Jung, Uoochang (author);Jin, In-Tae (author) is a scholarly article available to read on EtoBox.

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Park, Minseok (author);Kim, Daeyoung (author);Jung, Uoochang (author);Jin, In-Tae (author)