About this scholarly article

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Resistive extraction of polysilicon gate linewidth by Miles, G.; Hook, T.; Faucher, M.; Morrett, K. is a scholarly article available to read on EtoBox.

Author

Miles, G.; Hook, T.; Faucher, M.; Morrett, K.

Publisher

IEEE

Published

1997