Opening book details…
About this Physics and Astronomy article
Temperature and time dependence of B and P diffusion in Si during surface oxidation by Packan, P. A.; Plummer, J. D. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Packan, P. A.; Plummer, J. D.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1990
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)