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Measurement of the Fracture Energy of SiO2/TiN Interfaces Using the Residually-Stressed Thin-Film Micro-Strip Test by Xu, Guanghai; Ragan, D. D.; Clarke, D. R.; He, Ming Y.; Ma, Qing; Fujimoto, H. is a Engineering article available to read on EtoBox.

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Author
Xu, Guanghai; Ragan, D. D.; Clarke, D. R.; He, Ming Y.; Ma, Qing; Fujimoto, H.
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
1996
Language
EN
Field
Engineering (Physical Sciences)

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