Opening book details…
About this Engineering article
Simulation Studies on Sputtering in Rough Surface by T. Kenmotsu; Y. Yamamura; T. Muramoto; N. Hirotani is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T. Kenmotsu; Y. Yamamura; T. Muramoto; N. Hirotani
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)
More by T. Kenmotsu; Y. Yamamura; T. Muramoto; N. Hirotani
Browse all works by T. Kenmotsu; Y. Yamamura; T. Muramoto; N. Hirotani