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About this Engineering article
A versatile ion implanter for planar and 3D device construction by Jerald P. Dykstra; Andy M. Ray; Robert B. Simonton is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jerald P. Dykstra; Andy M. Ray; Robert B. Simonton
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1991
- Field
- Engineering (Physical Sciences)
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