Opening book details…
About this Materials Science article
AlN films prepared on 6H–SiC substrates under various sputtering pressures by RF reactive magnetron sputtering by Kuang, Xu-Ping; Zhang, Hua-Yu; Wang, Gui-Gen; Cui, Lin; Zhu, Can; Jin, Lei; Sun, Rui; Han, Jie-Cai is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kuang, Xu-Ping; Zhang, Hua-Yu; Wang, Gui-Gen; Cui, Lin; Zhu, Can; Jin, Lei; Sun, Rui; Han, Jie-Cai
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2012
- Language
- EN
- Field
- Materials Science (Physical Sciences)