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About this Chemistry article
ChemInform Abstract: A Novel Process for Fabricating Conformal and Stable TiN-Based Barrier Films. by J. P. LU; W. Y. HSU; Q. Z. HONG; G. A. DIXIT; J. D. LUTTMER; R. H. HAVEMANN; L. K. MAGEL is a Chemistry article available to read on EtoBox.
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- Author
- J. P. LU; W. Y. HSU; Q. Z. HONG; G. A. DIXIT; J. D. LUTTMER; R. H. HAVEMANN; L. K. MAGEL
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley (ISSN 0931-7597)
- Published
- 1997
- Field
- Chemistry (Physical Sciences)