About this scholarly article

Simulation of process variations in FinFET transistor patterning by Baer, Eberhard ;Burenkov, Alex ;Evanschitzky, Peter ;Lorenz, Juergen is a scholarly article available to read on EtoBox.

Author

Baer, Eberhard ;Burenkov, Alex ;Evanschitzky, Peter ;Lorenz, Juergen

Publisher

IEEE

Published

2016