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About this Engineering article
Investigation of the penetration of atomic hydrogen from the gas phase into SiO2/GaAs by Kagadei, V. A.; Nefyodtsev, E. V.; Proskurovsky, D. I. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kagadei, V. A.; Nefyodtsev, E. V.; Proskurovsky, D. I.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2001
- Field
- Engineering (Physical Sciences)
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