About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Optical Microlithography XXIV - A recursive cost-based approach to fracturing by Jiang, Shangliang; Ma, Xu; Zakhor, Avideh is a scholarly article available to read on EtoBox.

Author

Jiang, Shangliang; Ma, Xu; Zakhor, Avideh

Publisher

SPIE

Published

2011