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About this Physics and Astronomy article
IR spectra of ICPCVD SiNx thin films for MEMS structures by Rudakov, G; Reshetnikov, I is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Rudakov, G; Reshetnikov, I
- Publisher
- Institute of Physics; IOP Publishing (ISSN 1742-6588)
- Published
- 2015
- Field
- Physics and Astronomy (Physical Sciences)