About this Engineering article
High-rate Sputtering of Aluminum for Metallization of Integrated Circuits by McLeod, P. S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- McLeod, P. S.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0022-5355)
- Published
- 1977
- Language
- EN
- Field
- Engineering (Physical Sciences)