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About this Engineering article
Research on Chemo-mechanical Grinding of Large Size Quartz Glass Substrate by Libo Zhou; Takeshi Shiina; Zhongjun Qiu; Jun Shimizu; Takeyuki Yamamoto; Toshiaki Tashiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Libo Zhou; Takeshi Shiina; Zhongjun Qiu; Jun Shimizu; Takeyuki Yamamoto; Toshiaki Tashiro
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0141-6359)
- Published
- 2009
- Field
- Engineering (Physical Sciences)