About this scholarly article

European Workshop Materials for Advanced Metallization, - Investigations of the interaction between different barrier metals and copper surface during the chemical-mechanical polishing by Zeidler, D.; Stavreva, Z.; Plotner, M.; Drescher, K. is a scholarly article available to read on EtoBox.

Author

Zeidler, D.; Stavreva, Z.; Plotner, M.; Drescher, K.

Publisher

IEEE

Published

1998