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About this Engineering article
Layer by Layer Etching of the Highly Oriented Pyrolythic Graphite by Using Atomic Layer Etching by Kim, Y. Y.; Lim, W. S.; Park, J. B.; Yeom, G. Y. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, Y. Y.; Lim, W. S.; Park, J. B.; Yeom, G. Y.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)
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