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About this Engineering article
Effect of substrate preparation and deposition conditions on the preferred orientation of TiN coatings deposited by RF reactive sputtering by M.I Jones; I.R McColl; D.M Grant is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M.I Jones; I.R McColl; D.M Grant
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)