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Small-angle neutron scattering studies of hot-wire CVD a-Si:H by D.L. Williamson; D.W.M. Marr; E. Iwaniczko; B.P. Nelson is a Engineering article available to read on EtoBox.

What is Small-angle neutron scattering studies of hot-wire CVD a-Si:H about?

Several a-Si:H and a-Si:D films prepared by hot-wire chemical vapor deposition have been examined by small-angle neutron scattering (SANS) to search for H non-uniformity in this material. The SANS measurements were supplemented by small-angle X-ray scattering measurements. The differences in HyD detection sensitivity of these two techniques allow distinction of the scattering mechanisms. Two-or three-phase models are used to interpret the results quantitatively. Significant H non-uniformity, as well as a small fraction of microvoids, was found in the best-quality material. Samples grown with higher deposition rates or lower substrate temperatures have much larger void fractions. The size scale of the heterogeneity spans a range from 2 nm to more than 50 nm, with the largest features assigned to surface roughness.

Who reads Small-angle neutron scattering studies of hot-wire CVD a-Si:H?

Author

D.L. Williamson; D.W.M. Marr; E. Iwaniczko; B.P. Nelson

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

2003

Language

EN

Field

Engineering (Physical Sciences)