About this scholarly article

2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184) - Electrical characteristics of TaSi/sub x/N/sub y/ gate electrodes for dual gate Si-CMOS devices by You-Seok Suh, ; Heuss, G.; Huicai Zhong, ; Shin-Nam Hong, ; Misra, V. is a scholarly article available to read on EtoBox.

Author

You-Seok Suh, ; Heuss, G.; Huicai Zhong, ; Shin-Nam Hong, ; Misra, V.

Publisher

Japan Soc. Appl. Phys

Published

2001