About this scholarly article

IEEE/LEOS International Conference on Optical MEMs - MEMS applications of laser-induced ultra-shallow and ultraheavy boron-doping of silicon above the solid-solubility by Kerrien, G.; Kakushima, K.; Sarnet, T.; Boulmer, J.; Debarre, D.; Bouchier, D.; Bosseboeuf, A.; Bourouina, T. is a scholarly article available to read on EtoBox.

Author

Kerrien, G.; Kakushima, K.; Sarnet, T.; Boulmer, J.; Debarre, D.; Bouchier, D.; Bosseboeuf, A.; Bourouina, T.

Publisher

IEEE

Published

2002