About this scholarly article

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Novel Surface-Wave-Excited Plasma-Enhanced CVD System with Reciprocating Substrate Motion by Azuma, Kazufumi; Ueno, Satoko; Suzuki, Masayasu; Konishi, Yoshiyuki; Ishida, Shinichiro is a scholarly article available to read on EtoBox.

Author

Azuma, Kazufumi; Ueno, Satoko; Suzuki, Masayasu; Konishi, Yoshiyuki; Ishida, Shinichiro

Publisher

ECS

Published

2010

Language

EN