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About this Engineering article
Correlation of Defects on Dielectric Surfaces with Large Particle Counts in Chemical-Mechanical Planarization (CMP) Slurries Using a New Single Particle Optical Sensing (SPOS) Technique by Remsen, Edward E. ;Anjur, Sriram P. ;Boldridge, David ;Kamiti, Mungai ;Li, Shoutian is a Engineering article available to read on EtoBox.
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- Author
- Remsen, Edward E. ;Anjur, Sriram P. ;Boldridge, David ;Kamiti, Mungai ;Li, Shoutian
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2005
- Field
- Engineering (Physical Sciences)