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About this Engineering article
X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches by C. Lingk; M. E. Gross; W. L. Brown is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- C. Lingk; M. E. Gross; W. L. Brown
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)