About this scholarly article

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Supercritical Fluid Deposition (SCFD) Technique as a Novel Tool for MEMS Fabrication by Momose, T.; Ohkubo, T.; Uejima, T.; Saito, T.; Sugiyama, M.; Shimogaki, Y. is a scholarly article available to read on EtoBox.

Author

Momose, T.; Ohkubo, T.; Uejima, T.; Saito, T.; Sugiyama, M.; Shimogaki, Y.

Publisher

IEEE

Published

2009

Language

EN