About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Acoustic agitation for enhanced development of LIGA PMMA resists by Nilson, Robert H.; Griffiths, Stewart K.; Karam, Jean Michel; Yasaitis, John A. is a scholarly article available to read on EtoBox.

Author

Nilson, Robert H.; Griffiths, Stewart K.; Karam, Jean Michel; Yasaitis, John A.

Publisher

SPIE

Published

2000

Language

EN