About this scholarly article

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy by Topsu, Suat; Gorecki, Christophe; Asundi, Anand K.; Chassagne, Luc; Sinno, Ahmad; Osten, Wolfgang; Ruaux, Pascal; Alayli, Yasser; Lerondel, Gilles; Blaize, Stéphane; Bruyant, Auréline; Royer, Pascal is a scholarly article available to read on EtoBox.

Author

Topsu, Suat; Gorecki, Christophe; Asundi, Anand K.; Chassagne, Luc; Sinno, Ahmad; Osten, Wolfgang; Ruaux, Pascal; Alayli, Yasser; Lerondel, Gilles; Blaize, Stéphane; Bruyant, Auréline; Royer, Pascal

Publisher

SPIE

Published

2010