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About this Engineering article
Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization by Chang, Shou-Yi; Chen, Ming-Ku; Chen, Dao-Sheng is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chang, Shou-Yi; Chen, Ming-Ku; Chen, Dao-Sheng
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)
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