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About this Engineering article
High-purity and high-quality 4H–SiC grown at high speed by chimney-type vertical hot-wall chemical vapor deposition by K. Fujihira; T. Kimoto; H. Matsunami is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- K. Fujihira; T. Kimoto; H. Matsunami
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2002
- Language
- EN
- Field
- Engineering (Physical Sciences)