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About this Engineering article
SIMS analysis of ultrathin implanted arsenic layers in silicon by D. S. Kibalov; O. M. Orlov; S. G. Simakin; V. K. Smirnov is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- D. S. Kibalov; O. M. Orlov; S. G. Simakin; V. K. Smirnov
- Publisher
- SP MAIK Nauka/Interperiodica; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7850)
- Published
- 2004
- Field
- Engineering (Physical Sciences)
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