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This document presents the design and fabrication of a MEMS-based piezoelectric acoustic sensor utilizing a sputtered ZnO layer on a silicon diaphragm. The sensor demonstrates high sensitivity, a wide frequency response from 31.5Hz to 8KHz, and an average sensitivity of 50mVrms/Pa. The fabrication process and modeling techniques, including FEM analysis, are detailed, showcasing the sensor

Author

Ravi Teja

Language

EN