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About this Engineering article
Detection of SiH2radicals in an a-Si:H deposition plasma by laser-induced fluorescence by Heintze, M; Bauer, G H is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Heintze, M; Bauer, G H
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 1995
- Field
- Engineering (Physical Sciences)