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About this Engineering article
Unbiased roughness measurements: Subtracting out SEM effects, part 2 by Lorusso, Gian F.; Rutigliani, Vito; Van Roey, Frieda; Mack, Chris A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lorusso, Gian F.; Rutigliani, Vito; Van Roey, Frieda; Mack, Chris A.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics; AVS Science and Technology Society (ISSN 1520-8567)
- Published
- 2018
- Field
- Engineering (Physical Sciences)
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