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What is MEMS Comb Drive Design and Fabrication about?

This homework assignment involves calculating the capacitance and electrostatic force of a transverse comb drive MEMS device, repeating the calculations for a longitudinal comb drive, and proposing a two-mask, two-layer polysilicon process flow to fabricate a 3-link polysilicon chain structure attached at the outer links.

Author

Ivan Avramov

Language

EN