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About this Engineering article
Influence of lattice polarity of nitrogen and aluminum doping on 4H-SiC epitaxial layer by Kazutoshi Kojima; Satoshi Kuroda; Hajime Okumura; Kazuo Arai is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kazutoshi Kojima; Satoshi Kuroda; Hajime Okumura; Kazuo Arai
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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