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Laminar Flow Impact on Fab Ventilation by Muhammad Zaidi Misni is a document available to read on EtoBox.
What is Laminar Flow Impact on Fab Ventilation about?
The document summarizes a study on the effects of laminar airflow in semiconductor fabs on the ventilation design for exhausted enclosures. Tracer gas testing was conducted by releasing known concentrations of test gas inside an enclosure and measuring outside concentrations. Testing showed that laminar flow decreases the effectiveness of exhaust ventilation, with higher laminar flowrates and smaller exhaust flowrates increasing outside concentrations. The conclusions were that tracer gas testing should acc
- Author
- Muhammad Zaidi Misni
- Language
- EN