Can I read Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66) on EtoBox?

Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66) by Alfred Kwok-Kit Wong; SPIE is a nonfiction available to read on EtoBox.

What is Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66) about?

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.Contents - Foreword - Preface - List of Symbols - Basic Electromagnetism - Elements of Geometrical Optics - Elements of Diffraction Theory - Imaging of Extended Objects with Finite Sources - Resolution and Image Enhancement - Oblique Rays - Aberrations - Numerical Computation - Variabilities - Appendix A: Birefringence - Appendix B: Stationarity and Ergodicity - Appendix C: Some Zernike Polynomials - Appendix D: Simulator Accuracy Tests - Appendix E: Select Refractive Indexes - Appendix F: Ass

Who reads Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)?

Author

Alfred Kwok-Kit Wong; SPIE

Publisher

SPIE Optical Engineering Press

Published

2005

Language

EN

ISBN

9780819478702

Category

nonfiction

Subjects

Engineering, Stem