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2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Localized degradation and breakdown study of cerium-oxide high-к gate dielectric material using scanning tunneling microscopy by Shubhakar, K.; Pey, K.L.; Kushvaha, S.S.; O'Shea, S.J.; Bosman, M.; Kouda, M.; Kakushima, K.; Iwai, H. is a scholarly article available to read on EtoBox.
- Author
- Shubhakar, K.; Pey, K.L.; Kushvaha, S.S.; O'Shea, S.J.; Bosman, M.; Kouda, M.; Kakushima, K.; Iwai, H.
- Publisher
- IEEE
- Published
- 2010
- Language
- EN