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2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Thin film encapsulated SiGe accelerometer for MEMS above IC integration by Wen, L.; Guo, B.; Haspeslagh, L.; Severi, S.; Witvrouw, A.; Puers, R. is a scholarly article available to read on EtoBox.
- Author
- Wen, L.; Guo, B.; Haspeslagh, L.; Severi, S.; Witvrouw, A.; Puers, R.
- Publisher
- IEEE
- Published
- 2011
- Language
- EN
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