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About this Engineering article
Ion Trajectories in Plasma Ion Implantation of Slender Cylindrical Bores Using a Small Inner End Source by Tian, Xiubo; Gong, Chunzhi; Huang, Yongxian; Jiang, Haifu; Yang, Shiqin; Fu, Ricky K. Y.; Chu, Paul K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tian, Xiubo; Gong, Chunzhi; Huang, Yongxian; Jiang, Haifu; Yang, Shiqin; Fu, Ricky K. Y.; Chu, Paul K.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)