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2016 JSSC DualMems by wangericxin is a document available to read on EtoBox.
What is 2016 JSSC DualMems about?
This paper introduces a dual-MEMS resonator-based temperature sensor that achieves a resolution of 20 µK and a conversion rate of 200 S/s, with a figure of merit (FOM) of 0.04 pJK². The sensor utilizes two resonators with different temperature coefficients to measure temperature accurately, enabling a MEMS-based programmable oscillator suitable for telecom applications. The design leverages low power consumption and high frequency stability, making it a promising solution for precision timekeeping in variou
- Author
- wangericxin
- Language
- EN