About this scholarly article

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer by Qifang Hu, ; Chengchen Gao, ; Yilong Hao, ; Dacheng Zhang, ; Guizhen Yan, ; Yangxi Zhang, is a scholarly article available to read on EtoBox.

Author

Qifang Hu, ; Chengchen Gao, ; Yilong Hao, ; Dacheng Zhang, ; Guizhen Yan, ; Yangxi Zhang,

Publisher

IEEE

Published

2010

Language

EN