About this scholarly article

2006 International Interconnect Technology Conference - Integration of air gaps based on selective ozone/TEOS deposition into a multi layer metallization scheme by Stich, A.; Gabric, Z.; Pamler, W.; Schindler, G.; Traving, M.; Engelhardt, M. is a scholarly article available to read on EtoBox.

Author

Stich, A.; Gabric, Z.; Pamler, W.; Schindler, G.; Traving, M.; Engelhardt, M.

Publisher

IEEE

Published

2006