Opening book details…
About this Physics and Astronomy article
A Facility for Characterizing the Dynamic Mechanical Behavior of Thin Membranes for Microelectromechanical Systems by Hall, J. D.; Apperson, N. E.; Crozier, B. T.; Xu, C.; Richards, R. F.; Bahr, D. F.; Richards, C. D. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Hall, J. D.; Apperson, N. E.; Crozier, B. T.; Xu, C.; Richards, R. F.; Bahr, D. F.; Richards, C. D.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0034-6748)
- Published
- 2002
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)