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About this Engineering article
Structural characterization of nanocomposite Ti–Si–N coatings prepared by pulsed dc plasma-enhanced chemical vapor deposition by Ma, Shengli; Ma, Dayan; Xu, Kewei; Jie, Wanqi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ma, Shengli; Ma, Dayan; Xu, Kewei; Jie, Wanqi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)
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