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About this Physics and Astronomy article
Characterization of a radio-frequency discharge used for downstream plasma oxidation of Si by Cook, J. G.; LeBrun, L.; Zhongming, Li; Ogryzlo, E. A. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Cook, J. G.; LeBrun, L.; Zhongming, Li; Ogryzlo, E. A.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1995
- Field
- Physics and Astronomy (Physical Sciences)
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