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About this Engineering article
PREVAIL-EPL alpha tool: Early results by S. D. Golladay; H. C. Pfeiffer; C. A. Bohnenkamp; R. S. Dhaliwal; W. A. Enichen; M. S. Gordon; R. A. Kendall; J. E. Lieberman; W. Stickel; J. D. Rockrohr; E. V. Tressler; A. Tanimoto; T. Yamaguchi; K. Okamoto; K. Suzuki; T. Miura; T. Okino; S. Kawata; K. Morita; S. C. Suzuki; H. Shimizu; S. Kojima; G. Varnell; W. T. Novak; M. Sogard is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. D. Golladay; H. C. Pfeiffer; C. A. Bohnenkamp; R. S. Dhaliwal; W. A. Enichen; M. S. Gordon; R. A. Kendall; J. E. Lieberman; W. Stickel; J. D. Rockrohr; E. V. Tressler; A. Tanimoto; T. Yamaguchi; K. Okamoto; K. Suzuki; T. Miura; T. Okino; S. Kawata; K. Morita; S. C. Suzuki; H. Shimizu; S. Kojima; G. Varnell; W. T. Novak; M. Sogard
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2001
- Field
- Engineering (Physical Sciences)