About this scholarly article

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Holography, Diffractive Optics, and Applications II - In situ monitoring during ion-beam etching of multilayer dielectric gratings: simulation and experiment by Sheng, Yunlong; Lin, Hua; Li, Lifeng; Hsu, Dahsiung; Yu, Chongxiu; Zeng, Lijiang; Lee, Byoungho is a scholarly article available to read on EtoBox.

Author

Sheng, Yunlong; Lin, Hua; Li, Lifeng; Hsu, Dahsiung; Yu, Chongxiu; Zeng, Lijiang; Lee, Byoungho

Publisher

SPIE

Published

2005

Language

EN