About this scholarly article

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Processing variables for the reduction of stiction on MEMS devices by Denton, Heidi L.; Davison, Mike; Smith, James H.; Karam, Jean Michel is a scholarly article available to read on EtoBox.

Author

Denton, Heidi L.; Davison, Mike; Smith, James H.; Karam, Jean Michel

Publisher

SPIE

Published

1999

Language

EN