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Can I read ZnO epitaxial films grown by flux-modulated RF-MBE on EtoBox?
ZnO epitaxial films grown by flux-modulated RF-MBE by Katsuya Hirano; Miki Fujita; Masanori Sasajima; Tomohiro Kosaka; Yoshiji Horikoshi is a Engineering article available to read on EtoBox.
What is ZnO epitaxial films grown by flux-modulated RF-MBE about?
The effect of VI/II ratio on crystalline quality and surface flatness in ZnO films is investigated by molecular beam epitaxy (MBE) with a radio-frequency(RF)-plasma oxygen source. The minimum residual electron concentration of 2.4 Â 10 17 cm À3 has been obtained for the sample grown at stoichiometry. The sample grown under oxygen-enriched condition, however, exhibits an excellent surface flatness. To combine these desirable characteristics at the same time, we use flux-modulation method. In this method, deposition sequence is composed of the repetition of oxygen-and zinc-enriched growth durations. By using this method, we succeeded in growing high-quality ZnO epitaxial films with low-residual electron concentration of 9.7 Â 10 16 cm À3 and improved surface flatness.
Who reads ZnO epitaxial films grown by flux-modulated RF-MBE?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Katsuya Hirano; Miki Fujita; Masanori Sasajima; Tomohiro Kosaka; Yoshiji Horikoshi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)