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CH4/H2 RIE of InGaAsP/InP materials: An application to DFB laser fabrication by G. Meneghini; L. Boschis; C. Coriasso; A. Stano; M. Gentili; L. Grella; M. Figliomeni is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
G. Meneghini; L. Boschis; C. Coriasso; A. Stano; M. Gentili; L. Grella; M. Figliomeni
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
Published
1993
Language
EN
Field
Engineering (Physical Sciences)

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